One article on understanding lithography machines


Release time:

2021-12-08

With the continuous shrinking of the chip manufacturing process, lithography machines have also developed by leaps and bounds in the past few decades. EUV lithography, which is now being adopted by TSMC and other advanced factories, has become the focus of everyone's attention. How does the lithography machine work? Let's take a look at the popular science of ASML. To understand its principle, first start by understanding its outer protective shell.

One article on understanding lithography machines

With the continuous shrinking of the chip manufacturing process, lithography machines have also developed by leaps and bounds in the past few decades. EUV lithography, which is now being adopted by TSMC and other advanced factories, has become the focus of everyone's attention. How does the lithography machine work? Let's take a look at the popular science of ASML. To understand its principle, first start by understanding its outer protective shell.